微奈米製作技術與感測器

Micro/Nano fabrications and Sensors

學期

107-1

學分

3 學分

當期課號

5120

永久課號

IIE5023

開課單位

生醫工程研究所

授課教師

許鉦宗

校區

光復

類別

選修

上課時間表

節	週四
5 13:20–14:10	微奈米製作技術與感測器 EE113 3 節連堂
6 14:20–15:10
7 15:30–16:20

* 根據陽明交大上課時間表所列

概述

This course provides fundamentals of micro and nano fabrication techniques for modern sensors, especially semiconductor-based sensors. This course also provides students surface modification methods to functionalize specific sensors. Students will learn how to prepare specific sensors with modern IC fabrication process. In addition to thin film process, thick film process and wet process techniques usually used in sensors preparation are also included.

先修科目

Chemistry and biology Modern physics Modern Electronics

評分方式

(1) Midterm Exam I 30% (2) Midterm Exam II 30% (3) Final Exam 40%

週次計畫

週次	主題
第 1 週	INTRODUCTION: micro/nanofabrications for sensors
第 2 週	LITHOGRAPHY: Basics of photolithography, alternative lithographic tools, emerging lithographic techniques.
第 3 週	PATTERN TRANSFER: bottom-up and top-down techniques
第 4 週	BULK AND SURFACE MICROMACHINING: Wet anisotropic etching, thin film properties.
第 5 週	DRY ETCHING: microloading effect, RIE for high aspect ratio structures ...
第 6 週	Exam I
第 7 週	CHEMICAL VAPOR DEPOSITIONS (CVDS): ALD, LPCVD, PECVD ...
第 8 週	SCALING LAW
第 9 週	TRANSDUCTION TECHNIQUES FOR MINIATURIZED BIOSENSORS Definition of bioMEMS Transduction techniques Optical transduction Electro (chemical) transduction
第 10 週	TRANSDUCTION TECHNIQUES FOR MINIATURIZED BIOSENSORS (II) Mechanical transduction MEMS transducers One specific application of MEMS biosensors: detection of pathogen agents
第 11 週	BIORECEPTORS AND GRAFTING METHODS(I) Types of bioreceptor Catalytic receptors Affinity receptors Nucleic acid-based receptors Molecularly imprinted polymers
第 12 週	Exam II
第 13 週	BIORECEPTORS AND GRAFTING METHODS (II) Immobilization strategies Adsorption and antifouling strategies Entrapment methods Covalent coupling Other capture systems Immobilization strategies: summary
第 14 週	PATTERNING TECHNIQUES FOR THE BIOFUNCTIONALIZATION OF MEMS (I) What is surface patterning? Direct biopatterning in liquid phase Ink delivery by non-contact methods
第 15 週	PATTERNING TECHNIQUES FOR THE BIOFUNCTIONALIZATION OF MEMS (II) Replication of patterns Light-induced patterning strategies Microcontact printing In-flux functionalization
第 16 週	FROM MEMS TO NEMS BIOSENSORS Importance of downscaling Challenges faced by NEMS for biosensing applications Issues related to nanomechanical transducers Issues related to the functionalization of NEMS On the importance of packaging and sample preparation Economic considerations
第 17 週	COMPARING PERFORMANCES OF BIOSENSORS: IMPOSSIBLE MISSION?
第 18 週	Final Exam

教科書

1. Fundamentals of Microfabrication and Nanotechnology, Third Edition, CRC Press, 2011. 2. Micro-and Nanoelectromechanical Biosensors, Liviu Nicu, John Wiley & Sons Singapore Pte. Ltd. 2014 3. Handouts

Office Hours

地點: TKB building 616A
時間: Monday 15:00~17:00 Wednesday 15:00~16:30
聯絡方式: ~55815