低溫電漿原理與應用

This course introduces the fundamental concepts of low-temperature plasma physics and brief corresponding applications in industry and bio-medical fields. In this course, fundamentals of low-temperature plasma physics will be emphasized. Types of non-thermal plasmas covered include low-, medium- and atmospheric-pressure ones, which are often found in various fields of industrial applications. Introduction to important modeling techniques in plasma physics, which include fluid modeling and PIC methods, are also covered at the end of the course. One midterm project about zero-dimensional modeling of plasma and two final projects are requested at end of the course, which include a 1-D fluid modeling and a 1-D PIC for plasma modeling. In summary, the major goal of this course is to endow the students in mechanical engineering the capability in efficiently dealing with increasingly important plasma science in the modern scientific and industrial society. 1. Introduce the fundamental electromagnetics for students with mechanical engineering background. 2. Introduce the operational principles of plasma physics in various kinds of plasma chamber in semiconductor materials processing. 3. Introduce the developments in simulation and experimental techniques for plasma flows in materials processing. 4. Hands-on simulations using 1-D fluid modeling for typical DC & RF gas discharges.

Fluid Mechanics, Eng. Math.

1. Homework 30% (N times) 2. Midterm exam 30% 3. Project Report 40%

• Single particle motion
• Fundamentals of plasma equations and equilibrium
• Atomic collisions
• Plasma dynamics in weakly ionized plasma
• DC sheaths
• DC discharges
• Capacitive discharges
• Applications of low-pressure discharges
• Simulation techniques in plasma modeling (PIC, fluid modeling)
• Atmospheric-pressure discharges
• Applications of Atmospheric-pressure discharges
• Inductive discharges (optional)
• Introduction to non-thermal plasma

1. Principles of Plasma Discharge and Materials Processing by M.A. Lieberman and A.J. Lichtenberg, John Wiley & Sons, Inc, 1994. 2. Plasma Electronics: Applications in Microelectronic Device Fabrication by T. Makabe and Z. Petrovic, Taylor & Francis, 2006. 3. Plasma Processes and Plasma Kinetics by Boris M. Smirnov, WILEY-VCH, 2007. 4. Introductory Transport Theory for Charged Particle in Gases by Robert E. Robson, World Scientific, 2006.