微機電系統概論

Microelectromechanical system (MEMS) is an exciting technology that has been permeating our everyday lives in recent years. MEMS sensors have been used in automobiles, projectors, mobile phones, and gaming devices. Silicon processing and CMOS technology provide the opportunity to create micromachines, microsensors, and microactuators with performance that is often not possible in traditional technology. This course is an introduction to this growing field. The course will cover a wide range of subjects, including MEMS applications, techniques of MEMS, key fabrication processes, principles and examples of microactuators and microsensors. Design tools and fabrication foundry services will be overviewed for the purpose of designing MEMS devices in the final projects. 1. Introduction and Overview 2. Fundamentals of Microfabrication 3. Fabrication Foundry Services 4. Design Tools (Layout and FEM) 5. Transducers (Actuators, Sensors and Systems) 6. Applications 7. Lab and Final Projects

physics, calculus, electronics

homework 40%, mid-term report 20%, final project 40%

References 1. Chang Liu, “Foundations of MEMS,” 2006 (Chang Liu, “微機電系統原理與應用,” 高立圖書有限公, 2008) 2. J. W. Gardner, et al.,“Microsensors, MEMS, and Smart Devices,” 2003 3. S.M. Sze, “Semiconductor Sensors,” 1994

地點

EE 708

時間

TBA

聯絡方式

x31838, yichiu@mail.nctu.edu.tw