微/奈米機電系統之晶片實作
MEMS/NEMS-Chips Laboratory
學期
108-1
學分
3
學分
當期課號
5353
永久課號
IAP5148
開課單位
工學院碩士在職專班-精密組
授課教師
鍾添淦
校區
光復
類別
選修
上課時間表
| 節 | 週三 |
|---|---|
A 18:30–19:20 | 微/奈米機電系統之晶片實作 EE231 3 節連堂 |
B 19:30–20:20 | |
C 20:30–21:20 |
* 根據陽明交大上課時間表所列
概述
學習微奈米級製程與量測、微奈米級物理感測器與致動器以及包含對應上述各項技術之專題實驗. Learning Micro/Nanoscale Fabrication and Characterization, Micro/Nanoscale Sensors and Actuators (including corresponding hand-on experiments).
先修科目
普通物理 College Physics
教學方式
TAs: Yi-Hsien Wu (吳一賢), godapolo.me03@g2.nctu.edu.tw, Ext 55194
評分方式
60 points- 6 Hand-On Experiments 20 points- 1st Exam 15 points- 2nd Exam 5 points- Class Attendance
週次計畫
| 週次 | 主題 |
|---|---|
| 第 1 週 | Introduction |
| 第 2 週 | {Lecture} Micro Fabrication: Photo-Lithography, CAD/Layout (for Photo Mask), Film Deposition, Physical Vapor Deposition, Chemical Vapor Deposition, Electroplating, Etching, Lift-Off Process, etc. Micro Characterization: Optimal Microscope, Profilo-meter, Scanning Electron Microscope |
| 第 3 週 | {Lecture} Micro Fabrication: Photo-Lithography, CAD/Layout (for Photo Mask), Film Deposition, Physical Vapor Deposition, Chemical Vapor Deposition, Electroplating, Etching, Lift-Off Process, etc. Micro Characterization: Optimal Microscope, Profilo-meter, Scanning Electron Microscope |
| 第 4 週 | {Lecture} Micro Fabrication: Photo-Lithography, CAD/Layout (for Photo Mask), Film Deposition, Physical Vapor Deposition, Chemical Vapor Deposition, Electroplating, Etching, Lift-Off Process, etc. Micro Characterization: Optimal Microscope, Profilo-meter, Scanning Electron Microscope |
| 第 5 週 | {Lecture} Nano Fabrication: E-Beam Lithography, Imprinting Lithography, CAD-Layout (for e-beam writing path), Film Deposition, Physical Vapor Deposition, Chemical Vapor Deposition, Electroplating, Etching, Lift-Off Process, etc. Nano Characterization: Scanning Electron Microscope, Scanning Probe Microscope, |
| 第 6 週 | (Hand-On Experiment 4) Micro/Nano-Fabrication and Characterization |
| 第 7 週 | (Hand-On Experiment 1) Micro/Nano-Fabrication and Characterization |
| 第 8 週 | (Hand-On Experiment 2) Micro/Nano-Fabrication and Characterization |
| 第 9 週 | (Hand-On Experiment 3) Micro/Nano-Fabrication and Characterization |
| 第 10 週 | Midterm |
| 第 11 週 | (Lecture) Micro/Nano Sensors |
| 第 12 週 | (Hand-On Experiment 5) Fabrication & Testing of Micro/Nano Sensors part 1 |
| 第 13 週 | {Lecture} Micro/Nano Sensors |
| 第 14 週 | (Hand-On Experiment 5) Fabrication & Testing of Micro/Nano Sensors part 2 |
| 第 15 週 | {Lecture} Micro/Nano Actuators |
| 第 16 週 | (Hand-On Experiment 6) Fabrication & Testing of Micro/Nano Actuator |
| 第 17 週 | Final Presentation |
| 第 18 週 | Final Presentation |
教科書
Lecture Notes, Lab Notes, Electronic Resources/Textbooks
Office Hours
- 地點
- Class room or EE422
- 時間
- Right after each class: 1 hour
- 聯絡方式
- Ext. 55116 mail: tkchung@nctu.edu.tw