真空科學與技術
Vacuum Technology and Applications
| 節 | 週二 |
|---|---|
2 09:00–09:50 | 真空科學與技術 EF352 3 節連堂 |
3 10:10–11:00 | |
4 11:10–12:00 |
* 根據陽明交大上課時間表所列
This course is intended to provide fundamental theory of vacuum science and hand-on knowledge in dealing with vacuum systems ranging from surface analytic tools such as XPS and AES, sputters, plasma etcher, to molecular beam deposition system for graduate students and undergraduate students working on their research projects. Students are expected to learn the following through lectures, homeworks, reports, and presentation on special projects: Fundamental theory of vacuum science, Vacuum technology of pumps, pipe, fitting, accessories and integration, Selection of pressure gauges, temperature control and measurement and materials selection of vacuum components Applications of vacuum technologies in (a) thin film deposition, (b) atomic layer deposition, and (c) plasma etching, Development of engineers’ skill and practice through technical report and presentation
None
1. Lectures – Jim Leu Fundamentals Engineering and Applications Future Needs Case Studies 2. Project Presentations and Reports by students
1. Reports and Presentation (2 each): 50% 2. Assignments (5): 50%
| 週次 | 主題 |
|---|---|
| 第 1 週 | 概論 Overview |
| 第 2 週 | 真空概論 /氣體分子動力論 氣流與氣導 /氣體的吸附和放出 Molecular Theory of Gases, Gas flow and conductance |
| 第 3 週 | Need to re-schedule 真空幫浦 (I) Vacuum Pumps (I) |
| 第 4 週 | 真空幫浦 (II) Vacuum Pumps (II) |
| 第 5 週 | 真空/流量度量 Measurement of Pressure and Flow |
| 第 6 週 | 期中報告 mid-term presentation |
| 第 7 週 | 真空材料概論及封合 Materials, components and welding in vacuum system |
| 第 8 週 | 真空系統溫度量測/系統設計 Design and Fabrication of Vacuum System and Leak detection |
| 第 9 週 | 期中報告 Mid-term presentation |
| 第 10 週 | 真空系統溫度量測/系統設計 Temperature measurement and heating design |
| 第 11 週 | 真空鍍膜 (I) Thin Films Deposition (I) |
| 第 12 週 | 真空鍍膜 (II) Thin Films Deposition |
| 第 13 週 | 原子層沉積 (I) Atomic layer deposition (I) |
| 第 14 週 | 原子層沉積 (II) Atomic layer deposition (II) |
| 第 15 週 | 電漿蝕刻 (1) Plasma Etching (1) |
| 第 16 週 | Holiday |
| 第 17 週 | 電漿蝕刻 (2) Plasma Etching (2) |
| 第 18 週 | 期末報告 Final report |
Testbook and Reference Books 1. 真空技術與應用, 儀科中心 2. M.A. Liberman and A.J. Lichtenberg, Principles of Plasma Discharges and Materials Processing, John Wiley & Sons, New York (1994) 3. Dorothy M. Hoffman, Bawa Singh, and John H. Thomas, III, Handbook of Vacuum Science and Technology, Academic Press (1998) 4. G. L. Weissler and R.W. Carlson, Vacuum Science and Technology, Academic Press, Inc. (1979) 5. J.F. O’Hanlon, A User’s Guide to Vacuum Technology, John Wiley & Sons, Inc. (1980) 6. Nigel S. Harris, Modern Vacuum Practice, McGraw-Hill Publishing Co. (1989)
- 地點
- EF413, Engineering Building No. 6
- 時間
- Tuesdays E, G, and G (9:10-12:00 am)
- 聯絡方式
- (03) 5131420 or jimleu@mail.nctu.edu.tw