奈米微影科技導論

Introduction to Nanolithography

學期

109-2

學分

3 學分

當期課號

5155

永久課號

IIB5124

開課單位

影像與生醫光電研究所

授課教師

陳國平

校區

歸仁

類別

選修

上課時間表

節	週二
5 13:20–14:10	奈米微影科技導論 CM216 3 節連堂
6 14:20–15:10
7 15:30–16:20

* 根據陽明交大上課時間表所列

概述

更新: 本課程提供跨校區遠距教室授課, 交大台南校區奇美樓216 / 交大光復校區工程四館B06 /陽明校區:圖資大樓404 The objective of this course is to let students learn the fundamental knowledge of onano-lithography. There will be materials for students to understand the current trend and know-how of the advanced optical lithography equipment or materials. In this course, we will describe the things that drive the limits of optical lithography and study optical imaging from the perspective of diffraction, and the advanced development of the new lithography technology. The goal is to develop a fundamental understanding of concepts of diffraction, Fourier spectral analysis, coherency theory, lens interaction, aberration concepts, image enhancement, and automatic micro-imaging measurement.

先修科目

Optics, electromagnetics

教學方式

1. 本課程提供跨校區遠距教室授課, 交大台南校區奇美樓216 / 交大光復校區工程四館B06 /陽明校區:圖資大樓404 2. 授課教師會輪流在各校區授課並提供同步遠距視訊. 3. 期末評量以口頭與書面報告為主並會邀請業界講師進行演講.

評分方式

midterm 30%, homework 30%, final 40% (group presentation 20% and final report 20%)

週次計畫

週次	主題
第 1 週	Syllabus introduction and introduction, semiconductor industry overview
第 2 週	Introduction to optical lithography
第 3 週	Electromagnetic radiation Plane waves, Intensity
第 4 週	Diffraction and Fourier transform Aerial image formation
第 5 週	Partial coherence Aberrations
第 6 週	Flare and defocus
第 7 週	Vector imaging, image metrics Standing waves
第 8 週	Swing curves Top and bottom ARCs
第 9 週	Midterm
第 10 週	Chemistry of photoresisit Materials.
第 11 週	RET – Optical proximity correction
第 12 週	Focus exposure, process window, DOF, MEEF
第 13 週	Advanced lithography I: X-ray lithography, LIGA, interference lithography.
第 14 週	Advanced lithography II: E-beam lithography
第 15 週	Metrology system
第 16 週	Oral presentation

教科書

Microlithography: Science and Technology, Third Edition CRC Press, 2013 Kazuaki Suzuki, Bruce Smith

Office Hours

地點: 台南校區奇美樓517 或視訊方式
時間: 星期二上午11:00-noon
聯絡方式: 57824 or skype: kobela031