微機電系統技術導論
Introduction to Micro Electro Mechanical Systems
| 節 | 週三 |
|---|---|
2 09:00–09:50 | 微機電系統技術導論 EE209 3 節連堂 |
3 10:10–11:00 | |
4 11:10–12:00 |
* 根據陽明交大上課時間表所列
Microelectromechanical systems (MEMS) are a rapidly growing field that will permeate our everyday lives in the coming decades. Silicon processing technology is providing the opportunity to create micromachines and microsensors/ microactuators with performance that is often not possible with mainstream. This course is an introduction to this growing field. The course will cover a wide range of subjects - including MEMS applications, techniques of MEMS, key processes to produce MEMS components, principles and examples of microactuators and sensors. Publicly available design, analysis tools and fabrication processes such as IntelliCAD, MEMScAP’s MUMPs process and CMOS MEMS process will be overviewed for the purpose of designing MEMS devices in the future.
助教輔助模擬軟體實習教學與
| 週次 | 主題 |
|---|---|
| 第 1 週 | Introduction and Overview |
| 第 2 週 | Introduction and Overview |
| 第 3 週 | Frequently Used MEMS Materials |
| 第 4 週 | Frequently Used MEMS Materials |
| 第 5 週 | Fundamentals of Microfabrication (Lithography, Thin Film Deposition / Etching, Bulk Micro Machining) |
| 第 6 週 | Fundamentals of Microfabrication (Lithography, Thin Film Deposition / Etching, Bulk Micro Machining) |
| 第 7 週 | Fundamentals of Microfabrication (Lithography, Thin Film Deposition / Etching, Bulk Micro Machining) |
| 第 8 週 | Fundamentals of Microfabrication (Lithography, Thin Film Deposition / Etching, Bulk Micro Machining) |
| 第 9 週 | Fabrication Processes I (MUMPs/Camel): MEMS device layout tool “L-edit” training |
| 第 10 週 | Fabrication Processes I (MUMPs/Camel): MEMS device layout tool “L-edit” training |
| 第 11 週 | Fabrication Processes II (CMOS MEMS) |
| 第 12 週 | Mid-term report and design review |
| 第 13 週 | Circuit Layout Tools Introduction: Laker basic training |
| 第 14 週 | MEMS Devices Design, Modeling & Simulations: IntelliSuite on line training |
| 第 15 週 | Transducers (Actuators, Sensors and Systems) |
| 第 16 週 | Transducers (Actuators, Sensors and Systems) |
| 第 17 週 | Transducers (Actuators, Sensors and Systems) |
| 第 18 週 | Final project report |
微機電系統原理與應用, Chang Liu, 高立圖書有限公, 2008/01.
- 地點
- EE-772
- 聯絡方式
- chiou@mail.nctu.edu.tw 03-573-1881