微奈米工程導論
Introduction to Micro/Nanotechnology
學期
110-1
學分
3
學分
當期課號
5327
永久課號
IME5332
開課單位
機械工程學系
授課教師
鍾添淦
校區
光復
類別
選修
上課時間表
| 節 | 週一 |
|---|---|
5 13:20–14:10 | 微奈米工程導論 EE229 3 節連堂 |
6 14:20–15:10 | |
7 15:30–16:20 |
* 根據陽明交大上課時間表所列
概述
主要學習微奈米級的製程與量測技術, 輔以微奈米級物理感測器與致動器(練習製程整合藉以製作元件), 以及包含對應上述各項技術之專題實驗. Learn Micro/Nanoscale Fabrication and Characterization (Main Part of the Course), Micro/Nanoscale Sensors and Actuators (Integration of Fabrication-Processes for Devices), Including corresponding hand-on experiments.
先修科目
普通物理 College Physics
教學方式
Teaching Assistant (TA): Shih-Chun Chang ( 張士峻), Ext 55194, Email: roger50279.me09g@nctu.edu.tw Mayank Kohli (柯禮炎) Ext 55194, Email: mkohli.me06g@nctu.edu.tw
評分方式
60 points- 6 Hand-On Experiments 20 points- 1st Exam 15 points- 2nd Exam 5 points- Class Attendance
週次計畫
| 週次 | 主題 |
|---|---|
| 第 1 週 | Introduction |
| 第 2 週 | {Lecture} Micro Fabrication: Photo-Lithography, CAD/Layout (for Photo Mask), Film Deposition, Physical Vapor Deposition, Chemical Vapor Deposition, Electroplating, Etching, Lift-Off Process, etc. Micro Characterization: Optimal Microscope, Profilo-meter, Scanning Electron Microscope |
| 第 3 週 | {Lecture} Micro Fabrication: Photo-Lithography, CAD/Layout (for Photo Mask), Film Deposition, Physical Vapor Deposition, Chemical Vapor Deposition, Electroplating, Etching, Lift-Off Process, etc. Micro Characterization: Optimal Microscope, Profilo-meter, Scanning Electron Microscope |
| 第 4 週 | {Lecture} Micro Fabrication: Photo-Lithography, CAD/Layout (for Photo Mask), Film Deposition, Physical Vapor Deposition, Chemical Vapor Deposition, Electroplating, Etching, Lift-Off Process, etc. Micro Characterization: Optimal Microscope, Profilo-meter, Scanning Electron Microscope |
| 第 5 週 | {Lecture} Micro Fabrication: Photo-Lithography, CAD/Layout (for Photo Mask), Film Deposition, Physical Vapor Deposition, Chemical Vapor Deposition, Electroplating, Etching, Lift-Off Process, etc. Micro Characterization: Optimal Microscope, Profilo-meter, Scanning Electron Microscope |
| 第 6 週 | (Hand-On Experiment 1) Micro/Nano-Fabrication and Characterization |
| 第 7 週 | (Hand-On Experiment 2) Micro Fabrication and Characterization |
| 第 8 週 | (Hand-On Experiment 3) Micro/Nano-Fabrication and Characterization |
| 第 9 週 | (Hand-On Experiment 4) Micro/Nano-Fabrication and Characterization |
| 第 10 週 | 1st Exam |
| 第 11 週 | {Lecture} Nano Fabrication: E-Beam Lithography, Imprinting Lithography, CAD-Layout (for e-beam writing path), Film Deposition, Physical Vapor Deposition, Chemical Vapor Deposition, Electroplating, Etching, Lift-Off Process, etc. Nano Characterization: Scanning Electron Microscope, Scanning Probe Microscope. |
| 第 12 週 | {Lecture} Nano Fabrication: E-Beam Lithography, Imprinting Lithography, CAD-Layout (for e-beam writing path), Film Deposition, Physical Vapor Deposition, Chemical Vapor Deposition, Electroplating, Etching, Lift-Off Process, etc. Nano Characterization: Scanning Electron Microscope, Scanning Probe Microscope. |
| 第 13 週 | (Hand-On Experiment 5) Nano Fabrication and Characterization |
| 第 14 週 | (Lecture) Micro/Nano Sensors, Energy Harvesters, Actuators and Emerging Devices |
| 第 15 週 | (Hand-On Experiment 6) Micro/Nano Sensors and/or Actuators |
| 第 16 週 | 2nd Exam |
| 第 17 週 | Flexible (set by university): such as extra/make-up class, experiments, and exams |
| 第 18 週 | Flexible (set by university): such as extra/make-up class, experiments, and exams |
教科書
Lecture Notes, Lab Notes, Electronic Resources/Textbooks
Office Hours
- 地點
- Class room or EE422
- 時間
- Right after each class: 1 hour
- 聯絡方式
- Ext. 55116 mail: tkchung@nctu.edu.tw