表面分析技術

Surface Analysis Techniques

學期

111-1

學分

3 學分

當期課號

516338

永久課號

ENMS30042

開課單位

材料科學與工程學系

授課教師

黃彥霖

校區

光復

類別

選修

上課時間表

節	週二
5 13:20–14:10	表面分析技術 EF207 3 節連堂
6 14:20–15:10
7 15:30–16:20

* 根據陽明交大上課時間表所列

概述

In this course, we will introduce techniques for surface analysis and the physical mechanism, including scanning electron microscopy (SEM), Auger electron microscopy, X-ray photoelectron spectroscopy (XPS or ESCA), ultra-violet photoelectron spectroscopy (UPS), secondary ion mass spectroscopy (SIMS), ion scattering spectroscopy, vacuum technology, scanning probe microscopy (STM, AFM, etc.), low energy electron diffraction (LEED), and reflection high-energy electron diffraction (RHEED).

先修科目

普通物理 (general physics),普通化學(general chemistry)。 Suggested: 量子力學 (quantum mechanics),固態物理 (solid-state physics),半導體物理與製程 (semiconductor physics and manufacturing)

評分方式

The average of the midterm (40%) and the final examinations (45%) will contribute 85% of the final academic score. The rest (15%) depends on your class performance (quits and homework).

教科書

PPT slide presentation in English. Lecture notes will be provided.

Office Hours

時間: By appointment
聯絡方式: yenlinhuang@nycu.edu.tw