微奈米製作技術與感測器

Micro/Nano fabrications and Sensors

學期

111-1

學分

3 學分

當期課號

545454

永久課號

EEBM30006

開課單位

生醫工程研究所

授課教師

許鉦宗

校區

光復

類別

選修

上課時間表

節	週四
5 13:20–14:10	微奈米製作技術與感測器 EE209 3 節連堂
6 14:20–15:10
7 15:30–16:20

* 根據陽明交大上課時間表所列

概述

This course provides fundamentals of micro and nano fabrication techniques for modern sensors, especially semiconductor-based sensors. In addition to thin film process, thick film process and wet process techniques usually used in sensors preparation are also included. The accelerator and the biosensor fabrication processes will be investigated as a case study. Sensor scaling law is provided for both physical and chemical sensors. This course also provides students surface modification methods to functionalize specific sensors. Students will learn how to prepare specific sensors with modern IC fabrication process. Finally, a case study based on ADXL accelerometer will be investigated.

先修科目

Chemistry and biology Modern physics Modern Electronics

教學方式

Handouts and related articles will be provided via TA.

評分方式

(1) Midterm Exam I 30% (2) Final Exam 40% (3) Home work Assignments 30%

週次計畫

週次	主題
第 1 週	INTRODUCTION: Scope of this course importance of micro/nanofabrications for sensors
第 2 週	Holiday
第 3 週	LITHOGRAPHY: Basics of photolithography, alternative lithographic tools, emerging lithographic techniques.
第 4 週	PATTERN TRANSFER: bottom-up and top-down techniques
第 5 週	BULK AND SURFACE MICROMACHINING: Wet anisotropic etching, thin film properties.
第 6 週	DRY ETCHING: microloading effect, RIE for high aspect ratio structures ...
第 7 週	Exam#1
第 8 週	CHEMICAL VAPOR DEPOSITIONS (CVDS): ALD, LPCVD, PECVD ...
第 9 週	SCALING LAW
第 10 週	TRANSDUCTION TECHNIQUES FOR MINIATURIZED BIOSENSORS Definition of bioMEMS Transduction techniques Optical transduction Electro (chemical) transduction
第 11 週	TRANSDUCTION TECHNIQUES FOR MINIATURIZED BIOSENSORS (II) Mechanical transduction MEMS transducers One specific application of MEMS biosensors: detection of pathogen agents
第 12 週	BIORECEPTORS AND GRAFTING METHODS(I) Types of bioreceptor Catalytic receptors Affinity receptors Nucleic acid-based receptors Molecularly imprinted polymers
第 13 週	BIORECEPTORS AND GRAFTING METHODS (II) Immobilization strategies Adsorption and antifouling strategies Entrapment methods Covalent coupling Other capture systems Immobilization strategies: summary
第 14 週	A case study on ADXL physical sensors COMPARING PERFORMANCES OF BIOSENSORS: IMPOSSIBLE MISSION?
第 15 週	A case study on FET-based Biosensors
第 16 週	Final Exam
第 17 週
第 18 週

教科書

1. Fundamentals of Microfabrication and Nanotechnology, Third Edition, CRC Press, 2011. 2. Micro-and Nanoelectromechanical Biosensors, Liviu Nicu, John Wiley & Sons Singapore Pte. Ltd. 2014 3. Handouts extracted from recent related articles

Office Hours

地點: TKB building 616A
時間: Monday 15:00~17:00 Tuesday 15:00~16:30
聯絡方式: ~55815