先進元件製造技術導論
Introduction to advanced device fabrication technology
學期
111-2
學分
1
學分
當期課號
539003
永久課號
IIPS30014
開課單位
前瞻半導體研究所
授課教師
李耀仁
校區
光復
類別
選修
上課時間表
| 節 | 週三 |
|---|---|
8 16:30–17:20 | 先進元件製造技術導論 A310 |
* 根據陽明交大上課時間表所列
概述
This course will focus on advanced device fabrication technologies, covering advanced logic technologies (CMOS platform technologies, High mobility channels, GAA nanowires, and nanosheets-based devices), emerging devices (2D material devices, steep-slope devices, and Cryogenic Devices), and memory technologies (conventional memories, emerging memories, and 3D memory technologies)
先修科目
英語授課
評分方式
期中考35%、作業30%、期末專題報告35%
週次計畫
| 週次 | 主題 |
|---|---|
| 第 1 週 | Introduction |
| 第 2 週 | Advanced logic technology: CMOS platform technologies |
| 第 3 週 | Advanced logic technology: CMOS platform technologies |
| 第 4 週 | Advanced logic technology: High mobility channels |
| 第 5 週 | Advanced logic technology: High mobility channels |
| 第 6 週 | Advanced logic technology: High mobility channels |
| 第 7 週 | Advanced logic technology: GAA (vertically stacked) nanowires and nanosheets based devices |
| 第 8 週 | Advanced logic technology: GAA (vertically stacked) nanowires and nanosheets based devices |
| 第 9 週 | Mid-term exam |
| 第 10 週 | Emerging device : 2D devices |
| 第 11 週 | Emerging device : 2D material devices |
| 第 12 週 | Emerging device : Steep-slope devices |
| 第 13 週 | Emerging device : Cryogenic Devices |
| 第 14 週 | Memory technology : Conventional memories |
| 第 15 週 | Memory technology: Emerging memories & 3D memory technologies |
| 第 16 週 | Final-term presentation |
| 第 17 週 | |
| 第 18 週 |
教科書
(1) 教師自編講義 (conference proceedings :IEDM/VLSI 2020~2022)