半導體製程導論
Introduction to Semiconductor Fabrication
| 節 | 週四 |
|---|---|
2 09:00–09:50 | 半導體製程導論 CM212 3 節連堂 |
3 10:10–11:00 | |
4 11:10–12:00 |
* 根據陽明交大上課時間表所列
This class is an introduction to the technology of semiconductor fabrication, covering the scientific principles that have enabled the development of microelectronics and nanotechnology.
Lectures will be conducted in English, and while students are encouraged to speak English during class, it is not a requirement.
Homework: 25% Midterm: 35% Final exam: 40%
| 週次 | 主題 |
|---|---|
| 第 1 週 | Introduction |
| 第 2 週 | Semiconductor Substrates |
| 第 3 週 | Diffusion |
| 第 4 週 | Oxidation |
| 第 5 週 | Ion Implantation |
| 第 6 週 | Thermal Processing |
| 第 7 週 | Review |
| 第 8 週 | No class (Spring break) |
| 第 9 週 | Midterm Exam |
| 第 10 週 | Lithography |
| 第 11 週 | Photoresists |
| 第 12 週 | Etching |
| 第 13 週 | Physical Deposition |
| 第 14 週 | Chemical Vapor Deposition |
| 第 15 週 | Optoelectronic Technologies, Review |
| 第 16 週 | Final Exam |
| 第 17 週 | |
| 第 18 週 |
Reference Books: Stephen A Campbell, Fabrication engineering at the micro and nanoscale (Electronic version available from NYCU library) Xiao Hung, Introduction to Semiconductor Manufacturing Technology, Second Edition (Electronic version available from NYCU library) Gary S. May, Simon M. Sze, Fundamentals of Semiconductor Fabrication | Wiley Jim Plummer, Michael D. Deal, and Peter B. Griffin, Silicon VLSI Technology: Fundamentals, Practice and Modeling
- 時間
- Email to schedule.
- 聯絡方式
- E-mail: yingyuanhuang@nycu.edu.tw