微奈米製作技術與感測器
Micro/Nano fabrications and Sensors
| 節 | 週四 |
|---|---|
5 13:20–14:10 | 微奈米製作技術與感測器 EE207 3 節連堂 |
6 14:20–15:10 | |
7 15:30–16:20 |
* 根據陽明交大上課時間表所列
This course provides fundamentals of micro and nano fabrication techniques for modern sensors, especially semiconductor-based sensors. In addition to thin film process and thick film process, wet process techniques usually used in sensors preparation are also included. The accelerator and the biosensor fabrication processes will be investigated as case studies. Sensor scaling law is provided for both physical and chemical sensors, providing in-depth understand when scaling sensors. Finally, this course also provides students surface modification methods to functionalize specific sensors for both bio and gas disease detections. Students will learn how to design and prepare specific sensors with modern IC fabrication process.
Chemistry and biology Modern physics Modern Electronics
Handouts and related articles will be provided via assistance of TA.
(1) Midterm Exam I 30% (2) Final Exam 40% (3) Home work Assignments 30%
| 週次 | 主題 |
|---|---|
| 第 1 週 | INTRODUCTION: Scope of this courseimportance of micro/nanofabrications for sensors |
| 第 2 週 | Basics of photolithography, alternative lithographic tools |
| 第 3 週 | Emerging lithographic techniques: SPL, EBL, immersion Lithography |
| 第 4 週 | PATTERN TRANSFER: bottom-up and top-down techniques |
| 第 5 週 | BULK AND SURFACE MICROMACHINING: Wet anisotropic etching, thin film properties. |
| 第 6 週 | DRY ETCHING: microloading effect, RIE for high aspect ratio structures ... |
| 第 7 週 | CHEMICAL VAPOR DEPOSITIONS (CVDS): ALD, LPCVD, PECVD ... |
| 第 8 週 | Exam#1 |
| 第 9 週 | SCALING LAW |
| 第 10 週 | TRANSDUCTION TECHNIQUES FOR MINIATURIZED BIOSENSORSDefinition of bioMEMSTransduction techniquesOptical transductionElectro (chemical) transduction |
| 第 11 週 | TRANSDUCTION TECHNIQUES FOR MINIATURIZED BIOSENSORS (II)Mechanical transductionMEMS transducersOne specific application of MEMS biosensors: detection of pathogen agents |
| 第 12 週 | BIORECEPTORS AND GRAFTING METHODS(I)Types of bioreceptorCatalytic receptorsAffinity receptorsNucleic acid-based receptorsMolecularly imprinted polymers |
| 第 13 週 | BIORECEPTORS AND GRAFTING METHODS (II)Immobilization strategiesAdsorption and antifouling strategiesEntrapment methodsCovalent couplingOther capture systemsImmobilization strategies: summary |
| 第 14 週 | A case study on ADXL physical sensors |
| 第 15 週 | A case study on FET-based Biosensors |
| 第 16 週 | Final Exam |
| 第 17 週 | Discussions are welcome! |
| 第 18 週 | Discussions are welcome! |
1. Fundamentals of Microfabrication and Nanotechnology, Third Edition, CRC Press, 2011. 2. Micro-and Nanoelectromechanical Biosensors, Liviu Nicu, John Wiley & Sons Singapore Pte. Ltd. 2014 3. Handouts extracted from recent related articles and books
- 地點
- TKB building 616A
- 時間
- Monday 15:00~17:00 Tuesday 15:00~16:30
- 聯絡方式
- sheujt@nycu.edu.tw ~55815