微電子積體電路製程
VLSI Manufacture Technology
學期
112-2
學分
3
學分
當期課號
535954
永久課號
STVS30007
開課單位
國際半導體越南境外專班
授課教師
鍾錦翰
類別
必修
上課時間表
| 節 | 週三 |
|---|---|
A 18:30–19:20 | 微電子積體電路製程 3 節連堂 |
B 19:30–20:20 | |
C 20:30–21:20 |
* 根據陽明交大上課時間表所列
概述
This course provides a fundamental insight into the manufacturing technology of semiconductor devices and integrated circuits.
先修科目
Fundamental physics, chemistry, and mathematics
教學方式
Textbook is downloadable via sources such as Knovel. Handouts will be given in the beginning of the semester.
評分方式
Assignments and presentation: 30% Midterm exam (open book) 30% Final exam (open book) 40% *All assignments and exams are carried out online.
週次計畫
| 週次 | 主題 |
|---|---|
| 第 1 週 | Introduction |
| 第 2 週 | Semiconductor Basics |
| 第 3 週 | Semiconductor Basics |
| 第 4 週 | Wafer Manufacturing, Epitaxy, and Substrate Engineering |
| 第 5 週 | Thermal Process |
| 第 6 週 | Photolithography |
| 第 7 週 | Plasma Basics |
| 第 8 週 | Midterm Exam |
| 第 9 週 | Ion Implantation and Etch |
| 第 10 週 | Chemical Vapor Deposition and Dielectric Thin Films |
| 第 11 週 | Metallization |
| 第 12 週 | Chemical Mechanical Polishing |
| 第 13 週 | Process Integration |
| 第 14 週 | Integrated Circuit Processing Technologies |
| 第 15 週 | Presentation |
| 第 16 週 | Final Exam |
教科書
Introduction to Semiconductor Manufacturing Technology (2nd Edition) (Xiao, Hong, SPIE, 2012)
Office Hours
- 地點
- N/A
- 時間
- N/A
- 聯絡方式
- king@nctu.edu.tw