半導體製程技術概論(一)
Introduction to Semiconductor Manufacturing Technology (I)
學期
112-2
學分
3
學分
當期課號
536855
永久課號
SCMS30015
開課單位
應用化學系分子科學碩博班
授課教師
孫建文
校區
光復
類別
選修
上課時間表
| 節 | 週一 |
|---|---|
5 13:20–14:10 | 半導體製程技術概論(一) SB522 3 節連堂 |
6 14:20–15:10 | |
7 15:30–16:20 |
* 根據陽明交大上課時間表所列
概述
Silicon integrated circuit fabrication technology requires many diverse fields of science and engineering. This course will teach the key fabrication technologies and the scientific foundations that carried microelectronics well into nanotechnology.
先修科目
Knowledge of semiconductor device physics, solid state physics and principles of electrical engineering, modern physics
評分方式
midterm exam 50% final exam 50%
週次計畫
| 週次 | 主題 |
|---|---|
| 第 1 週 | Crystal Growth and Wafer Engineering Introduction |
| 第 2 週 | Crystal Growth and Wafer Engineering Introduction |
| 第 3 週 | Crystal Growth and Wafer Engineering Introduction |
| 第 4 週 | Emergence of Silicon Valley/ Moore’s Law |
| 第 5 週 | Emergence of Silicon Valley/ Moore’s Law |
| 第 6 週 | Invention of the Transistor |
| 第 7 週 | |
| 第 8 週 | Lithography and Pattern Transfer |
| 第 9 週 | Lithography and Pattern Transfer |
| 第 10 週 | Modern CMOS Technology |
| 第 11 週 | Semiconductor Manufacturing, Gettering and Wafer Cleaning |
| 第 12 週 | Thermal Oxidation and the Si/ SiO2 |
| 第 13 週 | InterfaceRapid Thermal Processing |
| 第 14 週 | Thin Film Deposition and Epitaxy |
| 第 15 週 | Etching |
| 第 16 週 | Statistical Process Control and Process Monitoring in Semiconductor Fabrication |
教科書
ppt files and handout
Office Hours
- 地點
- B430
- 時間
- every Wednesday and Thursday 2-4 PM
- 聯絡方式
- x56581