半導體製造技術導論
Introduction to Semiconductor Manufacturing Technology
| 節 | 週六 |
|---|---|
6 14:20–15:10 | 半導體製造技術導論 EF207 3 節連堂 |
7 15:30–16:20 | |
8 16:30–17:20 |
* 根據陽明交大上課時間表所列
Silicon IC Fabrication. For students interested in the physical bases and practical methods of silicon VLSI chip fabrication, or the impact of technology on device. Modern CMOS Technology Crystal Growth, Wafer Fabrication and Properties of Silicon Wafers, Clean Rooms and Wafer Cleaning, Lithography, Oxidation, Diffusion, Ion Implantation, Deposition, Etching, Backend Processes
Semiconductor devices basic knowledge
*部分內容將放在網路供同學複習,將可在E3平台下載播放 **錄影內容僅供個人學習/複習用,禁止傳閱。
作業部份: Home work:(quits) 30% 考試部份: Mid-Term Examination 30% Final Examination (close book) 40% Other Performance +5% 評量部份:
| 週次 | 主題 |
|---|---|
| 第 1 週 | Introduction and chap 1 |
| 第 2 週 | chap 3 Crystal Growth |
| 第 3 週 | chap 4 Clean Rooms and Wafer Cleaning |
| 第 4 週 | chap 4 and chap 5 Lithography |
| 第 5 週 | chap 5 II |
| 第 6 週 | chap 2 Wafer Fabrication and Properties of Silicon Wafers |
| 第 7 週 | chap 6 Oxidation |
| 第 8 週 | chap 6 II |
| 第 9 週 | 期中考 |
| 第 10 週 | chap 7 Diffusion |
| 第 11 週 | chap 7 II |
| 第 12 週 | chap 7 III and chap 9 Deposition |
| 第 13 週 | chap 9 II |
| 第 14 週 | chap 10 Etching I |
| 第 15 週 | chap 10 Etching II |
| 第 16 週 | 期末考 |
| 第 17 週 | 補充教學 CHAP 11 |
| 第 18 週 | 補充教學 CHAP 11 |
Text Book: Silicon VLSI Technology - Fundamentals, Practice and Modeling- Plummer, Deal and Griffin, Upper Saddle River, NJ :Prentice Hall,c2000. Reference Book: 半導體製程設備技術(2版),作者: 楊子明, 鍾昌貴, 沈志彥, 李美儀, 吳鴻佑, 詹家瑋, 吳耀銓,五南,2017
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