微奈米工程導論
Introduction to Micro/Nanotechnology
學期
113-1
學分
3
學分
當期課號
536108
永久課號
ENME30013
開課單位
機械工程學系
授課教師
鍾添淦
校區
光復
類別
選修
上課時間表
| 節 | 週一 |
|---|---|
5 13:20–14:10 | 微奈米工程導論 EE229 3 節連堂 |
6 14:20–15:10 | |
7 15:30–16:20 |
* 根據陽明交大上課時間表所列
概述
主要學習微奈米級的製程與量測技術, 課堂會發給每一位學生一片矽晶圓, 透過邊學習各式微奈米製程原理並邊執行連續製程實作(共6次實作), 最終做出晶片上各種關鍵微奈米結構與簡易元件, 實踐做中學的目標, 最後再學習各式最新之微奈米級物理感測器與致動器(學習更多應用所需之不同元件的不同製程整合方式, 並進行比較之學習). Major Part of the Course: Learn Micro/Nanoscale Fabrication and Characterization Other part of the Course: Learn Micro/Nanoscale Sensors and Actuators (Learn Integration of Different Fabrication-Processes for Devices), Including corresponding hand-on experiments.
先修科目
普通物理 College Physics
教學方式
Teaching Assistant (TA): Major TA: 黃子翰, Ext 55194, hzh312611122.en12@nycu.edu.tw Major TA: 王傑民, Ext. 55194, sti37275658.en12@nycu.edu.tw
評分方式
50 points- 5 Hand-On Experiments 25 points- 1st Exam 20 points- 2nd Exam 5 points- Class Attendance
週次計畫
| 週次 | 主題 |
|---|---|
| 第 1 週 | Introduction |
| 第 2 週 | {Lecture} Micro Fabrication:Photo-Lithography, CAD/Layout (for Photo Mask), Film Deposition, Physical Vapor Deposition, Chemical Vapor Deposition, Electroplating, Etching, Lift-Off Process, etc.Micro Characterization:Optimal Microscope, Profilo-meter, Scanning Electron Microscope |
| 第 3 週 | {Lecture} Micro Fabrication: Photo-Lithography, CAD/Layout (for Photo Mask), Film Deposition, Physical Vapor Deposition, Chemical Vapor Deposition, Electroplating, Etching, Lift-Off Process, etc.Micro Characterization:Optimal Microscope, Profilo-meter, Scanning Electron Microscope |
| 第 4 週 | {Lecture} Micro Fabrication: Photo-Lithography, CAD/Layout (for Photo Mask), Film Deposition, Physical Vapor Deposition, Chemical Vapor Deposition, Electroplating, Etching, Lift-Off Process, etc.Micro Characterization:Optimal Microscope, Profilo-meter, Scanning Electron Microscope |
| 第 5 週 | {Lecture}Micro Fabrication:Photo-Lithography, CAD/Layout (for Photo Mask), Film Deposition, Physical Vapor Deposition, Chemical Vapor Deposition, Electroplating, Etching, Lift-Off Process, etc.Micro Characterization:Optimal Microscope, Profilo-meter, Scanning Electron Microscope |
| 第 6 週 | {Lecture}Micro Fabrication:Photo-Lithography, CAD/Layout (for Photo Mask), Film Deposition, Physical Vapor Deposition, Chemical Vapor Deposition, Electroplating, Etching, Lift-Off Process, etc.Micro Characterization:Optimal Microscope, Profilo-meter, Scanning Electron Microscope (Hand-On Experiment 1)Micro/Nano-Fabrication and Characterization |
| 第 7 週 | (Hand-On Experiment 2)Micro Fabrication and Characterization |
| 第 8 週 | (Hand-On Experiment 3)Micro/Nano-Fabrication and Characterization |
| 第 9 週 | (Hand-On Experiment 4)Micro/Nano-Fabrication and Characterization Review of Micro Fabrication and Characterization |
| 第 10 週 | 1st Exam |
| 第 11 週 | {Lecture}Nano Fabrication:E-Beam Lithography, Imprinting Lithography, CAD-Layout (for e-beam writing path), Film Deposition, Physical Vapor Deposition, Chemical Vapor Deposition, Electroplating, Etching, Lift-Off Process, etc.Nano Characterization:Scanning Electron Microscope, Scanning Probe Microscope. |
| 第 12 週 | {Lecture}Nano Fabrication:E-Beam Lithography, Imprinting Lithography, CAD-Layout (for e-beam writing path), Film Deposition, Physical Vapor Deposition, Chemical Vapor Deposition, Electroplating, Etching, Lift-Off Process, etc.Nano Characterization:Scanning Electron Microscope, Scanning Probe Microscope. |
| 第 13 週 | {Lecture}Nano Fabrication:E-Beam Lithography, Imprinting Lithography, CAD-Layout (for e-beam writing path), Film Deposition, Physical Vapor Deposition, Chemical Vapor Deposition, Electroplating, Etching, Lift-Off Process, etc.Nano Characterization:Scanning Electron Microscope, Scanning Probe Microscope. |
| 第 14 週 | (Hand-On Experiment 5)Nano Fabrication and Characterization |
| 第 15 週 | (Lecture) Classical and New Micro/Nano Sensors and/or Actuators in Smart Phone and Wearable Devices Applications Review of Nano Fabrication and Characterization |
| 第 16 週 | 2nd Exam |
教科書
Lecture Notes, Lab Notes, Electronic Resources/Textbooks
Office Hours
- 地點
- Class room or EE422
- 時間
- Right after each class: 1 hour
- 聯絡方式
- Ext. 55116 mail: tkchung@nycu.edu.tw