微感測器原理與應用

Microelectromechanical system (MEMS) is an exciting technology that has permeated our everyday lives in recent years. MEMS sensors have been used in automobiles, projectors, mobile phones, and gaming devices. Silicon processing and CMOS technology provide the opportunity to create micromachines, microsensors, and microactuators with performance that is often not possible in traditional technology. This course is an introduction to this growing field. The course will cover a wide range of subjects, including MEMS applications, techniques of MEMS, key fabrication processes, principles and examples of microactuators and microsensors. Design tools and fabrication foundry services will be overviewed for the purpose of designing a MEMS sensor based on the CIC CMOS MEMS, PolyMUMPs, or SOI-MUMPs processes in the final projects. On-chip or off-chip read-out circuit design is also required in the final project. Topics: 1. Introduction and Overview 2. Fundamentals of Microfabrication 3. Fabrication Foundry Services 4. Finite Element Method Tools 5. Sensor Principles and Design (mechanical/thermal/resonant/optical sensors, etc.) 6. Final Projects

physics, calculus, electronic circuits, IC fabrication technology, introduction to MEMS, integrated circuit design, finite-element simulation tools, circuit simulation tools

homework 40%, final project 40%, midterm exam 15%, class performance 5%

主要參考書: S. D. Senturia, “Microsystem Design,” 2001 V. Kaajakari, “Practical MEMS,” 2009 其他參考書: H. Baltes, et al., eds. "CMOS MEMS," 2005 O. Brand, et al., eds. "Resonant MEMS," 2015 J. W. Gardner, et al.,“Microsensors, MEMS, and Smart Devices,” 2003 M. Elwenspoek et al., “Mechanical Microsensors,” 2001 S. M. Sze, “Semiconductor Sensors,” 1994