半導體製造技術導論
Introduction to Semiconductor Manufacturing Technology
| 節 | 週二 |
|---|---|
5 13:20–14:10 | 半導體製造技術導論 3 節連堂 |
6 14:20–15:10 | |
7 15:30–16:20 |
* 根據陽明交大上課時間表所列
Including the presetting of the semiconductor process, the explanation of the characteristics of the material, the process flow of the semiconductor device and the explanation of the corresponding process: Crystal Growth, Wafer Fabrication and Properties of Silicon Wafers, Clean Rooms and Wafer Cleaning, Lithography, Oxidation, Diffusion, Ion Implantation, Deposition, Etching, Backend Processes.
Basic knowledge of semiconductor devices / Electronic and Optoelectronic Materials
Home work/Lab: 20% Mid-Term Examination 30% Final Examination (close book) 50%
| 週次 | 主題 |
|---|---|
| 第 1 週 | Introduction and practical guide to semiconductor processing |
| 第 2 週 | Semiconductor materials and process chemicals |
| 第 3 週 | Semiconductor properties |
| 第 4 週 | Crystal growth |
| 第 5 週 | Clean rooms and wafer cleaning |
| 第 6 週 | Manufacturing wafers and substrate engineering |
| 第 7 週 | Contamination control and yield |
| 第 8 週 | Oxidation |
| 第 9 週 | Mid-Term Exam |
| 第 10 週 | Photolithography processes |
| 第 11 週 | Diffusion |
| 第 12 週 | Ion Implantation |
| 第 13 週 | Deposition 1 |
| 第 14 週 | Deposition 2 |
| 第 15 週 | Metallization |
| 第 16 週 | Etching |
| 第 17 週 | Process Integration |
| 第 18 週 | Final Exam |
Silicon VLSI Technology - Fundamentals, Practice and Modeling- Plummer, Deal and Griffin, Upper Saddle River, NJ: Prentice Hall, 2000. Introduction to Semiconductor Manufacturing Technology – Hong Xiao: SPIE Press, 2012.
- 地點
- VNU-HUS
- 時間
- Friday 17:00-18:00
- 聯絡方式
- phamnguyenhai@hus.edu.tw