固態物理(二)
Solid State Physics Ⅱ
| 節 | 週五 |
|---|---|
5 13:20–14:10 | 固態物理(二) EDB07 3 節連堂 |
6 14:20–15:10 | |
7 15:30–16:20 |
* 根據陽明交大上課時間表所列
The class will continue the scope of solid state physics I and focus on the essential parts for modern MOSFETs (e.g., FinFETs, nanosheet), which includes Si band structure (e.g., effective mass approximation, k.p), strain/stress, quantum confinement, carrier transport (e.g., phonon, Coulomb, surface roughness, remote Coulomb, and remote phonon scattering mechanisms), dielectrics (e.g., high-k), surface physics with Fermi level pinning (e.g., silicide junction), and finally carrier transport in metals (e.g., Cu, W, Ru).
延續固態物理(一)
Teaching on chalk board; no specific textbooks; all topics have corresponding applications in industry
Quiz 35% Midterm exam: 30% Final exam: 35%
- 1. Si band structure
- 2. Strain-stress
- 3. Quantum confinement
- 4. Carrier transport in modern MOSFETs
- 5. Dielectrics
- 6. Surface/interface physics
- 7. Carrier transport in metals
| 週次 | 主題 |
|---|---|
| 第 1 週 | Si band structure |
| 第 2 週 | Strain/stress, strain in nMOS: Impact on Ec, Vt, m*, μeff |
| 第 3 週 | k.p, strain in pMOS: Impact on Ev, Vt, m*, μeff |
| 第 4 週 | Quantum confinement in nMOS |
| 第 5 週 | Quantum confinement in pMOS |
| 第 6 週 | No class |
| 第 7 週 | Phonon, Coulomb, surface roughness scattering |
| 第 8 週 | No class |
| 第 9 週 | Midterm exam |
| 第 10 週 | Dielectrics properties |
| 第 11 週 | High-k materials & MOSCAP |
| 第 12 週 | Remote phonon, remote Coulomb scatterings |
| 第 13 週 | Fermi-level pinning & contact resistance |
| 第 14 週 | Fermi surface & metals |
| 第 15 週 | Carrier transport in metals |
| 第 16 週 | Final exam |
Textbook [1] C. Kittel, Introduction to solid state physics, 8th Ed., 2005 Wiley Reference book [1] D. Esseni, P. Palestri, L. Selmi, Nanoscale MOS transistors: Semi-classical transport and applications, 2011 Cambridge [2] D.A.B. Miller, Quantum mechanics for scientists and engineers, 2008 Cambridge [3] B.K. Ridley, Quantum processes in semiconductors, 5th Ed., 2013 Oxford [4] N.W. Aschcroft and N.D. Mermin, Solid state physics, 1976 Harcourt [5] W.A. Harrison, Solid state physics, 1979, Dove
- 地點
- Eng IV
- 時間
- Make an appointment using email, usually after the class
- 聯絡方式
- echchen@gmail.com