低溫電漿原理與應用
Fundamentals and Applications of Low-temperature Plasmas
| 節 | 週二 |
|---|---|
A 18:30–19:20 | 低溫電漿原理與應用 EE229 3 節連堂 |
B 19:30–20:20 | |
C 20:30–21:20 |
* 根據陽明交大上課時間表所列
This course is to instruct students with fundamental knowledge of chemical and physical processes of plasma (particularly low-temperature plasma). Plasma definition and generation, atomic collisions, plasma dynamics, particle transport mechanisms, plasma characteristics (both physical and chemical), fundamental plasma equations and equilibrium, and plasma applications & diagnostics will be covered. Students are expected to have profound comprehension of theoretical plasma principles and practical plasma applications.
Fluid Mechanics, Engineering Mathematics.
TAs will be assigned and can be reached by phone (#55176) or by lab visit (EE320)
Homework: 40% Midterm exam: 30% Quiz: 15% Final project: 15% The midterm is an individual exam, but the quiz is a group test. The final project is to submit a paper report regarding research on the atmospheric pressure plasma. *No adjustment on the final grade if below 68.
- Introduction to Plasma
- Single Particle Motion
- Plasma as Fluids
- Diffusion and Transport
- Langmuir Probe Measurement
- Low-temperature plasma application in semiconductor manufacturing
- Discharges
| 週次 | 主題 |
|---|---|
| 第 1 週 | Introduction, Definition of Plasma, Debye Shielding |
| 第 2 週 | Debye Shielding, Sheath, Plasma Parameters |
| 第 3 週 | Single particle Motion in Uniform E & B, Nonuniform B, Nonuniform E |
| 第 4 週 | Single particle Motion in Uniform E & B, Nonuniform B, Nonuniform E |
| 第 5 週 | Maxwell's Equations, Fluid Equation of Motion |
| 第 6 週 | Fluid Drift in B, Collision, Diffusion, Recombination |
| 第 7 週 | Fluid Drift in B, Collision, Diffusion, Recombination |
| 第 8 週 | Midterm (10/21) |
| 第 9 週 | Plasma Oscillations |
| 第 10 週 | Plasma Oscillations, Plasma Approximation |
| 第 11 週 | Plasma Approximation |
| 第 12 週 | Langmuir Probe Theory, Electron Temperature |
| 第 13 週 | Electron Density, Plasma Characteristics |
| 第 14 週 | Corona Discharges, Streamer Discharges, Dielectric-Barrier Discharges, Plasma Jet |
| 第 15 週 | Low-temperature plasma application in semiconductor manufacturing |
| 第 16 週 | Quiz |
Course will be taught based on lecture notes while students are encourage to read the reference listed below: 1. Introduction to Plasma Physics and Controlled Fusion by Francis F. Chen, Springer, 2016. 2. Principles of Plasma Discharge and Materials Processing by M.A. Lieberman and A.J. Lichtenberg, John Wiley & Sons, Inc, 1994. 3. MIT Open Course: Introduction to Plasma Physics I *References 1 & 2 have e-book and are available through NYCU Library.
- 地點
- Professor: EE473 TAs: EE320
- 時間
- By appointment
- 聯絡方式
- Professor: liaoyh@nycu.edu.tw or ext.55119 TAs: ex.55176