微/奈米機電系統之晶片實作
MEMS/NEMS-Chips Laboratory
| 節 | 週四 |
|---|---|
A 18:30–19:20 | 微/奈米機電系統之晶片實作 EE230 3 節連堂 |
B 19:30–20:20 | |
C 20:30–21:20 |
* 根據陽明交大上課時間表所列
[重要] 實作時段: 利用上課時段集中做實驗, 或可周末另外約補做實作. 主要學習微奈米級的製程與量測技術, 課堂會發給每一位學生一片矽晶圓, 透過邊學習各式微奈米製程原理並邊執行連續製程實作(共5次實作), 最終做出晶片上各種關鍵微奈米結構與簡易元件, 實踐做中學的目標, 最後再學習各式最新之微奈米級物理感測器與致動器(學習更多應用所需之不同元件的不同製程整合方式, 並進行比較之學習). Major Part of the Course: Learn Micro/Nanoscale Fabrication and Characterization, Including corresponding hand-on experiments. Other part of the Course: Learn Micro/Nanoscale Sensors and Actuators (Learn Integration of Different Fabrication-Processes for Devices).
普通物理 College Physics
Teaching Assistant (TA): Major TA: 林哲瑋, Ext 55194, lin0831qq.en13@nycu.edu.tw Major TA: 李書仲, Ext. 55194, jeffrey9162.en13@nycu.edu.tw
50 points- 5 Hand-On Experiments 25 points- 1st Exam 20 points- 2nd Exam 5 points- Class Attendance
| 週次 | 主題 |
|---|---|
| 第 1 週 | Introduction |
| 第 2 週 | {Lecture} Micro Fabrication: Basics of Silicon Wafer and Silicon Processing |
| 第 3 週 | {Lecture} Micro Fabrication: Photo-Lithography, CAD/Layout (for Photo Mask) |
| 第 4 週 | {Lecture} Micro Fabrication: Photo-Lithography, CAD/Layout (for Photo Mask) (Hand-On Experiment 1) Micro/Nano-Fabrication and Characterization |
| 第 5 週 | {Lecture} Micro Fabrication: Wet Etching |
| 第 6 週 | {Lecture} Micro Fabrication: Film Deposition, Physical Vapor Deposition (Hand-On Experiment 2) Micro/Nano-Fabrication and Characterization |
| 第 7 週 | {Lecture} Micro Fabrication: Film Deposition, Chemical Vapor Deposition, Dry Etching |
| 第 8 週 | {Lecture} Micro Fabrication: Electroplating (Hand-On Experiment 3) Micro/Nano-Fabrication and Characterization |
| 第 9 週 | {Lecture} Micro Fabrication: Lift-Off Process, etc. Micro Characterization: Optical Microscope, Profilo-meter, Scanning Electron Microscope (Hand-On Experiment 4) Micro/Nano-Fabrication and Characterization |
| 第 10 週 | Review of Micro Fabrication and Characterization |
| 第 11 週 | 1st Exam |
| 第 12 週 | {Lecture} Nano Fabrication: E-Beam Lithography |
| 第 13 週 | {Lecture} Nano Fabrication: E-Beam Lithography, Imprinting Lithography |
| 第 14 週 | {Lecture} Nano Fabrication: E-Beam Lithography, Imprinting Lithography Nano Characterization: Scanning Electron Microscope, Scanning Probe Microscope. (Hand-On Experiment 5) Nano Fabrication and Characterization |
| 第 15 週 | (Lecture) Classical and New Micro/Nano Sensors and/or Actuators in Smart Phone and Wearable Devices Applications Review of Nano Fabrication and Characterization |
| 第 16 週 | 2nd Exam |
Lecture Notes, Lab Notes, Electronic Resources/Textbooks
- 地點
- Class room or EE422
- 時間
- Right after each class: 1 hour
- 聯絡方式
- Ext. 55116 mail: tkchung@nycu.edu.tw