微奈米製造技術
Micro-nano fabrication technology
學期
114-2
學分
2
學分
當期課號
132619
永久課號
BEBN20018
開課單位
生醫光電研究所
授課教師
董奕鍾
校區
陽明
類別
選修
上課時間表
| 節 | 週一 |
|---|---|
3 10:10–11:00 | 微奈米製造技術 YK436 2 節連堂 |
4 11:10–12:00 |
* 根據陽明交大上課時間表所列
概述
Understand the basic knowledge of micro-nano fabrication technology.
先修科目
N/A
評分方式
Midterm: 50%; Final Exam: 50%
週次計畫
| 週次 | 主題 |
|---|---|
| 第 1 週 | Week 1: Now and Then of Micro-Nano Fabrication |
| 第 2 週 | Week 2: Materials and Oxidation Process |
| 第 3 週 | Week 3 and 4: Pattern Transfer - Optical Lithography |
| 第 4 週 | Week 3 and 4: Pattern Transfer - Optical Lithography |
| 第 5 週 | Week 5 and 6: Physical and Chemical Deposition |
| 第 6 週 | Week 5 and 6: Physical and Chemical Deposition |
| 第 7 週 | Week 7: Etching |
| 第 8 週 | Week 8: Review of Part I |
| 第 9 週 | Midterm |
| 第 10 週 | Week 10: Introduction of Microfluidics |
| 第 11 週 | Week 11 and 12: Soft Lithography and Applications |
| 第 12 週 | Week 11 and 12: Soft Lithography and Applications |
| 第 13 週 | Week 13: Process Integration |
| 第 14 週 | Week 14: Fabrication of Biomedical Devices and Their Applications |
| 第 15 週 | Week 15: Review of Part II |
| 第 16 週 | Final Exam |
教科書
Reference Books: 1. “Fabrication Engineering at the Micro- and Nanoscale,” Stephen A. Campbell, 4th Edition. 2. “Fundamental of Microfabrication,” Marc J. Madou.
Office Hours
- 聯絡方式
- E-mail: tungy@gate.sinica.edu.tw Tel: (02) 2787-3138