微電子積體電路製程
VLSI Manufacture Technology
| 節 | 週四 |
|---|---|
6 14:20–15:10 | 微電子積體電路製程 EF207 2 節連堂 |
7 15:30–16:20 |
* 根據陽明交大上課時間表所列
Silicon IC Fabrication. For students interested in the physical bases and practical methods of silicon VLSI chip fabrication, or the impact of technology on device. Modern CMOS Technology Crystal Growth, Wafer Fabrication and Properties of Silicon Wafers, Clean Rooms and Wafer Cleaning, Lithography, Oxidation, Diffusion, Ion Implantation, Deposition, Etching, Backend Processes
Semiconductor devices basic knowledge
*本課為遠距/網路教學課程， A.有2/3以上課程將在E3 平台下載播放 B.國定假日，有遠距上課 **錄影內容僅供學習/複習用，禁止傳閱。本課部分將放在網路供同學複習，將可在E3平台下載播放
Home work （小考 ~9次，採計最高6次）: 30% Mid-Term Examination 35% Final Examination (close book) 35% Other Performance +5%
| 週次 | 主題 |
|---|---|
| 第 1 週 | 課程簡介 |
| 第 2 週 | (3)Crystal Growth + (4) Wafer Fabrication and Properties of Silicon Wafers |
| 第 3 週 | (4)Wafer Fabrication and Properties of Silicon Wafers + (5) Lithography |
| 第 4 週 | (5) Lithography + (2) CMOS technology |
| 第 5 週 | (2) CMOS technology+ (6) Oxidation |
| 第 6 週 | (6) Oxidation |
| 第 7 週 | (6) Oxidation + Review past midterm exam |
| 第 8 週 | Midterm 考試 |
| 第 9 週 | (6) Oxidation |
| 第 10 週 | (7) Diffusion |
| 第 11 週 | (7) Diffusion+ (9) Deposition |
| 第 12 週 | (9) Deposition+ (10) Etching |
| 第 13 週 | (10) Etching |
| 第 14 週 | (10) Etching |
| 第 15 週 | chap 10 Etching |
| 第 16 週 | (11)Backend technology+ Review past final exam |
Text Book: Silicon VLSI Technology - Fundamentals, Practice and Modeling- Plummer, Deal and Griffin, Upper Saddle River, NJ :Prentice Hall,c2000. Reference Book: 半導體製程設備技術(3版)，作者： 楊子明, 鍾昌貴, 沈志彥, 李美儀, 吳鴻佑, 詹家瑋, 吳耀銓，五南,2017
- 地點
- Office: 工六館206A EF 206A
- 時間
- Thursday 14：40-16：30 or/and by appointment
- 聯絡方式
- E-mail: sermonwu@nycu.edu.tw TEL #: 31555